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1,2). aken into account. ion (KBC) at z = z. ~ h (in the scale of the gas phase kinetic parall1eters the value z. ering (channel S in Fig. 1), Def (b) is the probability of desorption (channel D in Fig. 1). hat. 2) is inhomogeneous because particles scattered directly (including resonant scattering through bound state) and the particles desorbing from the surface after relaxation in adsorbed layer are treated in different ways. 2) describes the influence of relaxational phenomena in the adsorbate on the gas phase perturbation at the surface.

Bogdanov 1991)), that this formalism was equivalent to the exact close coupling approach and could be used as a source for many well known dynamical approxhnation, widely used in gas - surface scattering, to mention here only different versions of perturbation theory and sudden approxhnation just a few. 7) with ~ef being the kernel of scattering froln defect. In order to study the statistical factor, let us first of all introduce the characteristic function of defect positions X{ak) that is equal to 1, if one of the defects is centered at cell ak, and Oothervise.

15) EeD is the diffusion activation barrier and Be - the pre-exponential factor depending on the tangential energy. The latter has been calculated within the theory of correlation functions (Doll and Voter 1985) and the transition state approach (Voter and Doll 1984) with the account of tunnel effects (Zhdanov 1985). (8c )= OR [D~(OR + k:Ts (ORV C. 8) since in the latter case it describes the three-dhllensional space diffusion, while in the former one - the diffusion over the layer {3. 10) is equivalent to including the repulsive part of the pair potential (Langllluir correction) and configurations without inner "cavities" in upper layers.